Advances in the reconstruction of atom probe tomography data

被引：194

作者：

Gault, B. ^{[1
,3
]}

Haley, D. ^{[1
]}

de Geuser, F. ^{[2
]}

Moody, M. P. ^{[3
]}

Marquis, B. A. ^{[1
]}

Larson, D. J. ^{[1
,4
]}

Geiser, B. P. ^{[4
]}

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[2] SIMaP Grenoble INP UJF CNRS, St Martin Dheres, France

[3] Univ Sydney, Australian Ctr Microscopy & Microanal, Sydney, NSW 2006, Australia

[4] Cameca Instruments Inc, Madison, WI 53711 USA

来源：

ULTRAMICROSCOPY | 2011年 / 111卷 / 06期

基金：

英国工程与自然科学研究理事会;

关键词：

Atom probe tomography; Reconstruction; Ion projection; FIELD-ION MICROSCOPE; IMAGE PROJECTION; LOCAL ELECTRODE; TRAJECTORIES; DEPTH; MAGNIFICATION; DESIGN;

D O I：

10.1016/j.ultramic.2010.11.016

中图分类号：

TH742 [显微镜];

学科分类号：

080401 [精密仪器及机械];

摘要：

Key to the integrity of atom probe microanalysis, the tomographic reconstruction is built atom by atom following a simplistic protocol established for previous generations of instruments. In this paper, after a short review of the main reconstruction protocols, we describe recent improvements originating from the use of exact formulae enabling significant reduction of spatial distortions, especially near the edges of the reconstruction. We also show how predictive values for the reconstruction parameters can be derived from electrostatic simulations, and finally introduce parameters varying throughout the analysis. (C) 2010 Elsevier BM. All rights reserved.

引用

页码：448 / 457

页数：10

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