共 46 条
[4]
Exploring the manufacturability of using block copolymers as resist materials in conjunction with advanced lithographic tools
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2007, 25 (06)
:1969-1975
[7]
Binary blends of diblock copolymers as an effective route to multiple length scales in perfect directed self-assembly of diblock copolymer thin films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2006, 24 (01)
:340-344
[10]
Guarini KW, 2003, 2003 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, P541