Two-dimensional infrared photonic crystal based on macroporous silicon

被引:24
作者
Gruning, U
Lehmann, V
机构
[1] Siemens AG, Department ZFE T ME, 81730 München
关键词
optical properties; silicon; structural properties; etching;
D O I
10.1016/0040-6090(95)08077-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The propagation of electromagnetic radiation in periodic dielectric media can be described similar to the case of electrons propagating in a crystal. A photonic bandgap, a frequency range where no electromagnetic modes exist, may open up in two or three dimensions and greatly affect the radiative dynamics within the structure. Requiring wavelength-scale structures, a photonic band material for optical and infrared frequencies is at the limit of today's fabrication techniques. Macroporous silicon offers a way to meet the requirements of regularity and high refractive index contrast for a two-dimensional (2D) photonic material in the infrared regime. By controlled formation of macropores in n-type silicon, we fabricated a 2D photonic lattice with photonic bandgaps in the infrared region between 250 and 500 cm(-1) (20-40 mu m). The transmission spectra between 50 and 650 cm(-1) were in good agreement with the theoretically calculated structure.
引用
收藏
页码:151 / 154
页数:4
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