Lateral ordering of quantum dots by periodic subsurface stressors

We investigate the possibility of using subsurface dislocation arrays as a tool for controlling the nucleation of self-assembled quantum dots (SAQDs). A quantitative model predicts that periodic nonuniform elastic fields on the surface induced by dislocations may control the lateral ordering SAQDs. The effect of dislocations is shown to be comparable to the interaction between buried and surface dots which leads to vertical dot stacking. The periodic subsurface dislocation arrays necessary for dot ordering can be produced by twist wafer bonding and backside substrate removal. (C) 1999 American Institute of Physics. [S0003-6951(99)00916-X].