DISLOCATION-FREE STRANSKI-KRASTANOW GROWTH OF GE ON SI(100)

被引:1801
作者
EAGLESHAM, DJ
CERULLO, M
机构
关键词
D O I
10.1103/PhysRevLett.64.1943
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We show that the islands formed in Stranski-Krastanow (SK) growth of Ge on Si(100) are initially dislocation free. Island formation in true SK growth should be driven by strain relaxation in large, dislocated islands. Coherent SK growth is explained in terms of elastic deformation around the islands, which partially accommodates mismatch. The limiting critical thickness, hc, of coherent SK islands is shown to be higher than that for 2D growth. We demonstrate growth of dislocation-free Ge islands on Si to a thickness of 500, 50×higher than hc for 2D Ge/Si epitaxy. © 1990 The American Physical Society.
引用
收藏
页码:1943 / 1946
页数:4
相关论文
共 25 条
[1]   HETEROEPITAXY OF GERMANIUM THIN-FILMS ON SILICON BY ION SPUTTERING [J].
ALEKSANDROV, LN ;
LOVYAGIN, RN ;
PCHELYAKOV, OP ;
STENIN, SI .
JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) :298-301
[2]  
[Anonymous], 1938, ABHANDLUNGEN AK B MN
[3]   HETEROEPITAXIAL GROWTH OF GE FILMS ON THE SI(100)-2X1 SURFACE [J].
ASAI, M ;
UEBA, H ;
TATSUYAMA, C .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (07) :2577-2583
[4]  
Bauer E., 1958, Z KRISTALLOGR, V110, P372, DOI DOI 10.1524/ZKRI.1958.110.1-6.372
[5]   GE-SI LAYERED STRUCTURES - ARTIFICIAL CRYSTALS AND COMPLEX CELL ORDERED SUPERLATTICES [J].
BEVK, J ;
MANNAERTS, JP ;
FELDMAN, LC ;
DAVIDSON, BA ;
OURMAZD, A .
APPLIED PHYSICS LETTERS, 1986, 49 (05) :286-288
[6]   MORPHOLOGICAL TRANSITIONS IN SOLID EPITAXIAL OVERLAYERS [J].
BRUINSMA, R ;
ZANGWILL, A .
EUROPHYSICS LETTERS, 1987, 4 (06) :729-735
[7]   SURFACTANTS IN EPITAXIAL-GROWTH [J].
COPEL, M ;
REUTER, MC ;
KAXIRAS, E ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :632-635
[8]   EPITAXIAL GROWTH OF SILICON AND GERMANIUM FILMS ON (111) SILICON SURFACES USING UHV SUBLIMATION AND EVAPORATION TECHNIQUES [J].
CULLIS, AG ;
BOOKER, GR .
JOURNAL OF CRYSTAL GROWTH, 1971, 9 (01) :132-&
[9]   INSITU MEASUREMENTS OF CRITICAL LAYER THICKNESS AND OPTICAL STUDIES OF INGAAS QUANTUM WELLS GROWN ON GAAS SUBSTRATES [J].
ELMAN, B ;
KOTELES, ES ;
MELMAN, P ;
JAGANNATH, C ;
LEE, J ;
DUGGER, D .
APPLIED PHYSICS LETTERS, 1989, 55 (16) :1659-1661
[10]  
FENNER DB, IN PRESS APPL PHYS L