Pretreatment of substrate surface for improved adhesion of diamond films on hard metal cutting tools

被引:74
作者
Deuerler, F
vandenBerg, H
Tabersky, R
Freundlieb, A
Pies, M
Buck, V
机构
[1] WIDIA GMBH,D-45145 ESSEN,GERMANY
[2] UNIV ESSEN GESAMTHSCH,D-45141 ESSEN,GERMANY
关键词
diamond films; plasma jet; cutting tools; intermediate layers;
D O I
10.1016/S0925-9635(96)00569-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The d.c. plasma jet CVD process is one of the most promising coating processes used for the production of polycrystalline diamond films. In comparison with other CVD processes, its obtainable linear growth rates, in the range of 100 mu m/h, are much higher than growth rates of microwave or hot filament CVD (1-10 mu m/h). One interesting application is the diamond coating of cutting tools. The main problem here is the poor adhesion of the films. Therefore, a mechanical or chemical pretreatment or intermediate layers are used to improve the adhesion. In these investigations the influence of mechanical pretreatment by grinding and polishing with diamond powder of different grain sizes as well as chemical etching are examined on WC-Co hardmetals. Sputtered metallic interlayers of different thicknesses and arc-ion plated amorphous carbon films are deposited on these substrates, and diamond films were synthesized on these pretreated cutting tools by d.c. plasma jet CVD. Adhesion and wear resistance of the diamond films have been examined by dry turning tests on very abrasive metal-matrix composites. Distinct improvement in adhesion of diamond coatings on hard metal substrates was achieved by two methods of substrate surface pretreatment: etching with Murakami's solution and following ultrasonically seeding with diamond particles or using an amorphous carbon film as intermediate layer.
引用
收藏
页码:1478 / 1489
页数:12
相关论文
共 47 条
[21]  
KUBELKA S, 1995, DIAMOND FILM TECHNOL, V5, P105
[22]   INTERLAYERS FOR DIAMOND-COATED CUTTING TOOLS [J].
KUPP, ER ;
DRAWL, WR ;
SPEAR, KE .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :378-383
[23]   INDUSTRIAL APPLICATION OF CRYSTALLINE DIAMOND-COATED TOOLS [J].
LEYENDECKER, T ;
LEMMER, O ;
JURGENS, A ;
ESSER, S ;
EBBERINK, J .
SURFACE & COATINGS TECHNOLOGY, 1991, 48 (03) :253-260
[24]   NITROGEN STABILIZED (100) TEXTURE IN CHEMICAL-VAPOR-DEPOSITED DIAMOND FILMS [J].
LOCHER, R ;
WILD, C ;
HERRES, N ;
BEHR, D ;
KOIDL, P .
APPLIED PHYSICS LETTERS, 1994, 65 (01) :34-36
[25]   EXTENSIVE DIAMOND FILM DEPOSITION BY DC PLASMA-JET CHEMICAL-VAPOR-DEPOSITION [J].
LUGSCHEIDER, E ;
SCHLUMP, W ;
DEUERLER, F ;
REMER, P .
DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) :325-327
[26]  
LUGSCHEIDER E, 1993, P TS 9O AACH MAR, V152, P19
[27]   INVESTIGATION OF LOW-PRESSURE DIAMOND DEPOSITION ON CEMENTED CARBIDES [J].
MEHLMANN, AK ;
DIRNFELD, SF ;
AVIGAL, Y .
DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) :600-604
[28]   NUCLEATION AND GROWTH OF DIAMOND ON CEMENTED CARBIDES BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION [J].
MEHLMANN, AK ;
FAYER, A ;
DIRNFELD, SF ;
AVIGAL, Y ;
PORATH, R ;
KOCHMAN, A .
DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) :317-322
[29]  
MONOGHAN DP, 1993, SURF COAT TECH, V60, P525
[30]   CHEMICAL VAPOR-DEPOSITION OF A DIAMOND COATING ONTO A TUNGSTEN CARBIDE TOOL USING ETHANOL [J].
MURAKAWA, M ;
TAKEUCHI, S ;
MIYAZAWA, H ;
HIROSE, Y .
SURFACE & COATINGS TECHNOLOGY, 1988, 36 (1-2) :303-310