Density multiplication and improved lithography by directed block copolymer assembly

被引：1099

作者：

Ruiz, Ricardo ^{[1
]}

Kang, Huiman ^{[2
]}

Detcheverry, Francois A. ^{[2
]}

Dobisz, Elizabeth ^{[1
]}

Kercher, Dan S. ^{[1
]}

Albrecht, Thomas R. ^{[1
]}

de Pablo, Juan J. ^{[2
]}

Nealey, Paul F. ^{[2
]}

机构：

[1] Hitachi Global Storage Technol, San Jose Res Ctr, San Jose, CA 95135 USA

[2] Univ Wisconsin, Dept Biol & Chem Engn, Madison, WI 53706 USA

来源：

SCIENCE | 2008年 / 321卷 / 5891期

关键词：

D O I：

10.1126/science.1157626

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Self-assembling materials spontaneously form structures at length scales of interest in nanotechnology. In the particular case of block copolymers, the thermodynamic driving forces for self- assembly are small, and low- energy defects can get easily trapped. We directed the assembly of defect- free arrays of isolated block copolymer domains at densities up to 1 terabit per square inch on chemically patterned surfaces. In comparing the assembled structures to the chemical pattern, the density is increased by a factor of four, the size is reduced by a factor of two, and the dimensional uniformity is vastly improved.

引用

页码：936 / 939

页数：4

共 31 条

[11] SYNTHESIS OF 3-BLOCK STYRENE-ISOPRENE-STYRENE COPOLYMER SINGLE-CRYSTALS VIA PLANE SHEAR-FLOW [J].

HADZIIOANNOU, G ;

MATHIS, A ;

SKOULIOS, A .

COLLOID AND POLYMER SCIENCE, 1979, 257 (02) :136-139

[12] The effect of temperature gradient on the microdomain orientation of diblock copolymers undergoing an order-disorder transition [J].

Hashimoto, T ;

Bodycomb, J ;

Funaki, Y ;

Kimishima, K .

MACROMOLECULES, 1999, 32 (03) :952-954

[13] Small-angle X-ray scattering and rheological studies on the ordering process of cylindrical microdomains in a polystyrene-block-polyisoprene copolymer [J].

Hashimoto, T ;

Ogawa, T ;

Sakamoto, N ;

Ichimiya, M ;

Kim, JK ;

Han, CD .

POLYMER, 1998, 39 (8-9) :1573-1581

[14]

HERR DJC, 2006, FUTURE FAB INT, V20, P82

[15] MACRO-LATTICE FROM SEGREGATED AMORPHOUS PHASES OF A 3 BLOCK COPOLYMER [J].

KELLER, A ;

PEDEMONTE, E ;

WILLMOUTH, FM .

NATURE, 1970, 225 (5232) :538-+

[16] Salt complexation in block copolymer thin films [J].

Kim, Seung Hyun ;

Misner, Matthew J. ;

Yang, Ling ;

Gang, Oleg ;

Ocko, Benjamin M. ;

Russell, Thomas P. .

MACROMOLECULES, 2006, 39 (24) :8473-8479

[17] Solvent-induced ordering in thin film diblock copolymer/homopolymer mixtures [J].

Kim, SH ;

Misner, MJ ;

Russell, TP .

ADVANCED MATERIALS, 2004, 16 (23-24) :2119-+

[18] Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates [J].

Kim, SO ;

Solak, HH ;

Stoykovich, MP ;

Ferrier, NJ ;

de Pablo, JJ ;

Nealey, PF .

NATURE, 2003, 424 (6947) :411-414

[19] Increased water retention in polymer electrolyte membranes at elevated temperatures assisted by capillary condensation [J].

Park, Moon Jeong ;

Downing, Kenneth H. ;

Jackson, Andrew ;

Gomez, Enrique D. ;

Minor, Andrew M. ;

Cookson, David ;

Weber, Adam Z. ;

Balsara, Nitash P. .

NANO LETTERS, 2007, 7 (11) :3547-3552

[20] Square arrays of vertical cylinders of PS-b-PMMA on chemically nanopatterned surfaces [J].

Park, Sang-Min ;

Craig, Gordon S. W. ;

La, Young-Hye ;

Solak, Harun H. ;

Nealey, Paul F. .

MACROMOLECULES, 2007, 40 (14) :5084-5094

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