Adsorption and oxidation effects in microcrystalline silicon

被引：7

作者：

Dylla, T ^{[1
]}

Finger, F ^{[1
]}

Carius, R ^{[1
]}

机构：

[1] Forschungszentrum Julich, Inst Photovolta, D-52425 Julich, Germany

来源：

AMORPHOUS AND NANOCRYSTALLINE SILICON-BASED FILMS-2003 | 2003年 / 762卷

关键词：

D O I：

10.1557/PROC-762-A2.5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Electron spin resonance and conductivity measurements were used to study adsorption and oxidation effects on microcrystalline silicon with different structure compositions ranging from porous, highly crystalline to compact, mixed phase amorphous/crystalline. We found a correlation between active surface area and the magnitude of observed meta-stable and irreversible effects.

引用

页码：81 / 86

页数：6

共 16 条

[1] Absorption strengths of Si-H vibrational modes in hydrogenated silicon [J].

Beyer, W ;

Ghazala, MSA .

AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY-1998, 1998, 507 :601-606

[2]

BEYER W, 2002, COMMUNICATION

[3]

Finger F, 2002, MATER RES SOC SYMP P, V715, P123

[4] Electronic properties of microcrystalline silicon investigated by electron spin resonance and transport measurements [J].

Finger, F ;

Müller, J ;

Malten, C ;

Carius, R ;

Wagner, H .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 266 :511-518

[5] Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth [J].

Houben, L ;

Luysberg, M ;

Hapke, P ;

Carius, R ;

Finger, F ;

Wagner, H .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1998, 77 (06) :1447-1460

[6] Paramagnetic defects in undoped microcrystalline silicon deposited by the hot-wire technique [J].

Kanschat, P ;

Lips, K ;

Brüggemann, R ;

Hierzenberger, A ;

Sieber, I ;

Fuhs, W .

AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY-1998, 1998, 507 :793-798

[7] Microcrystalline silicon prepared by hot-wire chemical vapour deposition for thin film solar cell applications [J].

Klein, S ;

Wolff, J ;

Finger, F ;

Carius, R ;

Wagner, H ;

Stutzmann, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2002, 41 (1AB) :L10-L12

[8] Microscopic structure of defects in microcrystalline silicon [J].

Kondo, M ;

Yamasaki, S ;

Matsuda, A .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 266 :544-547

[9] Structure and growth of hydrogenated microcrystalline silicon: Investigation by transmission electron microscopy and Raman spectroscopy of films grown at different plasma excitation frequencies [J].

Luysberg, M ;

Hapke, P ;

Carius, R ;

Finger, F .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1997, 75 (01) :31-47

[10] COMPLETE MICROCRYSTALLINE P-I-N SOLAR-CELL - CRYSTALLINE OR AMORPHOUS CELL BEHAVIOR [J].

MEIER, J ;

FLUCKIGER, R ;

KEPPNER, H ;

SHAH, A .

APPLIED PHYSICS LETTERS, 1994, 65 (07) :860-862

← 1 2 →