Er doping of GaN during growth by metalorganic molecular beam epitaxy

被引:55
作者
MacKenzie, JD [1 ]
Abernathy, CR
Pearton, SJ
Hommerich, U
Seo, JT
Wilson, RG
Zavada, JM
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Hampton Univ, Res Ctr Opt Phys, Hampton, VA 23668 USA
[3] USA, Res Off, Res Triangle Pk, NC 27709 USA
关键词
D O I
10.1063/1.121107
中图分类号
O59 [应用物理学];
学科分类号
摘要
1.54 mu m photoluminescence has been observed from GaN doped with Er during growth by metalorganic molecular beam epitaxy, Strong Er3+-related photoluminescence (PL) was measured at room temperature for GaN:Er doped during growth on c-plane Al2O3 and Si. Experiments to evaluate the effects C and O on the optical activity of Er indicated that these impurities dramatically enhance Er PL in GaN. GaN films doped with Er to a concentration of 3x10(18) cm(-3) with [O] similar to 10(20) cm(-3) and [C] similar to 10(21) cm(-3) luminesce at 1.54 mu m with an intensity similar to 2 orders of magnitude greater than films with oxygen and carbon backgrounds of less than 10(19) cm(-3). The thermal PL quenching behavior was also markedly different for samples of varying O and C content. Er3+ luminescence from samples with high O and C concentrations quenched by only 10% between 15 and 300 K while the integrated PL signal from the samples with lower [O] and [C] quenched similar to 85% over the same temperature range. (C) 1998 American Institute of Physics.
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页码:2710 / 2712
页数:3
相关论文
共 16 条
[1]  
DIGONNET MJF, 1993, RARE EARTH DOPED FIB, P72
[2]   MICROSTRUCTURE OF ERBIUM-IMPLANTED SI [J].
EAGLESHAM, DJ ;
MICHEL, J ;
FITZGERALD, EA ;
JACOBSON, DC ;
POATE, JM ;
BENTON, JL ;
POLMAN, A ;
XIE, YH ;
KIMERLING, LC .
APPLIED PHYSICS LETTERS, 1991, 58 (24) :2797-2799
[3]   1.54-MU-M LUMINESCENCE OF ERBIUM-IMPLANTED III-V SEMICONDUCTORS AND SILICON [J].
ENNEN, H ;
SCHNEIDER, J ;
POMRENKE, G ;
AXMANN, A .
APPLIED PHYSICS LETTERS, 1983, 43 (10) :943-945
[4]   LUMINESCENCE OF ERBIUM IMPLANTED IN VARIOUS SEMICONDUCTORS - IV-MATERIALS, III-V-MATERIALS AND II-VI MATERIALS [J].
FAVENNEC, PN ;
LHARIDON, H ;
SALVI, M ;
MOUTONNET, D ;
LEGUILLOU, Y .
ELECTRONICS LETTERS, 1989, 25 (11) :718-719
[5]  
KLEIN PB, 1988, ELECTRON LETT, V24, P1503
[6]   LATTICE LOCATION OF ERBIUM IMPLANTED INTO GAAS [J].
KOZANECKI, A ;
CHAN, M ;
JEYNES, C ;
SEALY, B ;
HOMEWOOD, K .
SOLID STATE COMMUNICATIONS, 1991, 78 (08) :763-766
[7]   Plasma characteristics and the growth of group III-nitrides by metalorganic molecular beam epitaxy [J].
MacKenzie, JD ;
Abbaschian, L ;
Abernathy, CR ;
Donovan, SM ;
Pearton, SJ ;
Chow, PC ;
VanHove, J .
JOURNAL OF ELECTRONIC MATERIALS, 1997, 26 (11) :1266-1269
[8]   GROWTH OF AIN BY METALORGANIC MOLECULAR-BEAM EPITAXY [J].
MACKENZIE, JD ;
ABERNATHY, CR ;
PEARTON, SJ ;
KRISHNAMOORTHY, V ;
BHARATAN, S ;
JONES, KS ;
WILSON, RG .
APPLIED PHYSICS LETTERS, 1995, 67 (02) :253-255
[9]   Er doping of AlN during growth by metalorganic molecular beam epitaxy [J].
MacKenzie, JD ;
Abernathy, CR ;
Pearton, SJ ;
Hommerich, U ;
Wu, X ;
Schwartz, RN ;
Wilson, RG ;
Zavada, JM .
APPLIED PHYSICS LETTERS, 1996, 69 (14) :2083-2085
[10]   IMPURITY ENHANCEMENT OF THE 1.54-MU-M ER3+ LUMINESCENCE IN SILICON [J].
MICHEL, J ;
BENTON, JL ;
FERRANTE, RF ;
JACOBSON, DC ;
EAGLESHAM, DJ ;
FITZGERALD, EA ;
XIE, YH ;
POATE, JM ;
KIMERLING, LC .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (05) :2672-2678