Laser micromachining of porous anodic alumina film

被引：10

作者：

Jha, H. ^{[1
]}

Kikuchi, T. ^{[1
]}

Sakairi, M. ^{[1
]}

Takahashi, H. ^{[1
]}

机构：

[1] Hokkaido Univ, Grad Sch Engn, Div Mat Sci & Engn, Lab Interface Microstruct Anal,Kita Ku, Sapporo, Hokkaido 0608628, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2007年 / 88卷 / 04期

关键词：

D O I：

10.1007/s00339-007-4140-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 mu m were fabricated on anodic alumina film with good precision and reproducibility.

引用

页码：617 / 622

页数：6

共 20 条

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