Adhesion and friction issues associated with reliable operation of MEMS

被引：66

作者：

Maboudian, R ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA

来源：

MRS BULLETIN | 1998年 / 23卷 / 06期

关键词：

D O I：

10.1557/S0883769400030633

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：47 / 51

页数：5

共 25 条

[11]

LIM MG, 1990, EL EL ENG MICR EL ME, P82

[12] Critical review: Adhesion in surface micromechanical structures [J].

Maboudian, R ;

Howe, RT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (01) :1-20

[13] Stiction reduction processes for surface micromachines [J].

Maboudian, Roya ;

Howe, Roger T. .

TRIBOLOGY LETTERS, 1997, 3 (03) :215-221

[14] Adhesion-related failure mechanisms in micromechanical devices [J].

Mastrangelo, C. H. .

TRIBOLOGY LETTERS, 1997, 3 (03) :223-238

[15] On the contact and adhesion of rough surfaces [J].

Maugis, D .

JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 1996, 10 (02) :161-175

[16]

Mulhern G. T., 1993, P 7 INT C SOL STAT S, P296

[17] MICRODYNAMICS [J].

MULLER, RS .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :1-8

[18]

MULLER RS, 1990, WHITE MICROSENSORS

[19] DIGITAL MICROMIRROR DEVICE AND ITS APPLICATION TO PROJECTION DISPLAYS [J].

SAMPSELL, JB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06) :3242-3246

[20] Surface-micromachined gear trains driven by an on-chip electrostatic microengine [J].

Sniegowski, JJ ;

Garcia, EJ .

IEEE ELECTRON DEVICE LETTERS, 1996, 17 (07) :366-368

← 1 2 3 →