Synthesis of β-Ga2O3 nanowires by an MOCVD approach

被引:47
作者
Kim, HW [1 ]
Kim, NH [1 ]
机构
[1] Inha Univ, Sch Mat Sci & Engn, Inchon 402751, South Korea
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 81卷 / 04期
关键词
D O I
10.1007/s00339-004-2982-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have synthesized monoclinic gallium oxide (beta-Ga2O3) nanowires on Au-coated Si substrates by a reaction of a trimethylgallium and oxygen mixture. The beta-Ga2O3 nanowires became progressively thinner from bottom to top, with diameters ranging from 10 to 200 nm and lengths of several micrometers. We found that Au-containing nanoparticles were attached to the tips of the beta-Ga2O3 nanowires and thus the nanowire growth could be a vapor-liquid-solid process.
引用
收藏
页码:763 / 765
页数:3
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