Voltage contrast in submicron integrated circuits by scanning force microscopy

被引：11

作者：

Bohm, C

Sprengepiel, J

Otterbeck, M

Kubalek, E

机构：

[1] Gerhard-Mercator-Univ.-GH-Duisburg, Fg. Werkstoffe der Elektrotechnik, 47048 Duisburg

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 02期

关键词：

D O I：

10.1116/1.588726

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A scanning force microscope can be used to measure a device's internal electrical potential with high spatial and temporal resolution. We present experimental results taken with a scanning force tester constructed in our lab that offers nanometer spatial resolution and gigahertz measurement bandwidth. The results are comparable to network analyzer results. (C) 1996 American Vacuum Society.

引用

收藏

页码：842 / 844

页数：3

相关论文

共 15 条

[1] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[2] VOLTAGE CONTRAST STUDIES ON 0-CENTER-DOT-5 MU-M INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY [J].

BOHM, C ;

SPRENGEPIEL, J ;

KUBALEK, E .

QUALITY AND RELIABILITY ENGINEERING INTERNATIONAL, 1995, 11 (04) :253-256

[3] VOLTAGE CONTRAST IN INTEGRATED-CIRCUITS WITH 100 NM SPATIAL-RESOLUTION BY SCANNING FORCE MICROSCOPY [J].

BOHM, C ;

SAURENBACH, F ;

TASCHNER, P ;

ROTHS, C ;

KUBALEK, E .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (10) :1801-1805

[4] ELECTRICAL CHARACTERIZATION OF INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY [J].

BOHM, C ;

ROTHS, C ;

MULLER, U ;

BEYER, A ;

KUBALEK, E .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1994, 24 (1-3) :218-222

[5] SCANNING-FORCE-MICROSCOPE TEST SYSTEM FOR DEVICE INTERNAL TEST WITH HIGH SPATIAL AND TEMPORAL RESOLUTION [J].

BOHM, C ;

ROTHS, C ;

KUBALEK, E .

MICROELECTRONIC ENGINEERING, 1994, 24 (1-4) :91-98

[6]

BOHM C, 1994, UNPUB P 24 EUR MICR

[7]

BOHM C, 1994, 1994 IEEE MTT S INT, V3, P1605

[8]

BRIDGES GE, 1994, APPL PHYS LETT, V64, P1442

[9]

BRIDGES GE, 1992, ULTRAMICROSCOPY, V42

[10]

COURTOIS B, 1993, ANN REPORT TECHNIQUE