Combined apparatus of scanning reflection electron microscope and scanning tunneling microscope

被引：32

作者：

Maruno, S ^{[1
]}

Nakahara, H ^{[1
]}

Fujita, S ^{[1
]}

Watanabe, H ^{[1
]}

Kusumi, Y ^{[1
]}

Ichikawa, M ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1997年 / 68卷 / 01期

关键词：

D O I：

10.1063/1.1147750

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A scanning reflection electron microscope (SREM) combined with a scanning tunneling microscope (STM) has been developed for the purpose of nanoscale structure fabrication under ultrahigh vacuum conditions. A STM unit consists of a piezoelectric tube scanner and an inch runner for coarse and fine approach of a STM tip. A sample holder and the STM unit have six drive axes relative to an electron gun for simultaneous observation by SREM and STM. Energy-dispersive x-ray spectroscopy equipment is also installed for surface sensitive elemental analysis. It has been demonstrated that on a Si(111) 7 x 7 surface atomic steps and 7 x 7 unit, cells can be observed in the SREM and STM images, respectively, and that surface elements with less than I ML thickness are detectable. (C) 1997 American Institute of Physics.

引用

页码：116 / 119

页数：4