Pull-in study of an electrostatic torsion microactuator

被引：200

作者：

Degani, O ^{[1
]}

Socher, E

Lipson, A

Leitner, T

Setter, DJ

Kaldor, S

Nemirovsky, Y

机构：

[1] Technion Israel Inst Technol, Dept Elect Engn, Kidron Microelect Res Ctr, IL-32000 Haifa, Israel

[2] RAFAEL, Armament Dev Author, MEMOS Lab, IL-31021 Haifa, Israel

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1998年 / 7卷 / 04期

关键词：

electrostatic; microactuator; micromirror; pull-in; torsion;

D O I：

10.1109/84.735344

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Pull-in study of an electrostatic microactuator is essential for making the electrostatic actuation more effective. In this paper, pull-in analysis is presented for an electrostatic torsion microactuator. The torsion microactuator can be used as a microtorsion mirror. A polynomial algebraic equation for the pull-in voltage and pull-in angle of a torsion microactuator is derived, Two types of microactuators fabricated using bulk micromachining are presented. Measurements done on the fabricated microactuators are reported, showing deviations within 1% error from the calculations. [325].

引用

页码：373 / 379

页数：7

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