Block lift-out sample preparation for 3D experiments in a dual beam focused ion beam microscope

被引:23
作者
Schaffer, Miroslava [1 ]
Wagner, Julian [1 ]
机构
[1] Graz Univ Technol, Res Inst Electron Microscopy, A-8010 Graz, Austria
关键词
FIB; EDXS; 3D microanalysis; sample preparation; block lift-out;
D O I
10.1007/s00604-007-0853-5
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We present the in-situ block lift-out sample preparation as an improvement of three dimensional sectioning experiments in a dual beam focused ion beam microscope. A soldering point between two iron pieces with a copper/silver solder is used as a sample, demonstrating the benefits of the preparation compared to performing sectioning experiments directly within the solid bulk sample. An automated routine is used to acquire a series of elemental maps by energy dispersive X-ray spectrometry from which a three dimensional copper distribution model is calculated.
引用
收藏
页码:421 / 425
页数:5
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