Experimental method for the determination of the energy distribution of stress-induced oxide traps

被引：23

作者：

Spinelli, AS ^{[1
]}

Lacaita, AL

Rigamonti, M

Ghidini, G

机构：

[1] Univ Insubria, Dipartimento Sci Chim Fis & Matemat, I-22100 Como, Italy

[2] Politecn Milan, Dipartimento Elettron & Informat, I-20133 Milan, Italy

[3] ST Microelect, I-20041 Agrate Brianza, Italy

来源：

IEEE ELECTRON DEVICE LETTERS | 1999年 / 20卷 / 03期

关键词：

D O I：

10.1109/55.748903

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An experimental procedure for the determination of the energy distribution of oxide neutral traps is presented, showing the evolution of the stress-induced damage as a function of Fowler-Nordheim stress fluence and field. It is shown that the traps are mainly distributed around 2 eV from the oxide conduction band. Results are presented for different oxide technologies, investigating the effect of oxide nitridation and growth conditions on the trap energy distribution.

引用

页码：106 / 108

页数：3

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