High performance enhancement mode high electron mobility transistors (E-HEMTs) lattice matched to InP

被引:5
作者
Mahajan, A
Fay, P
Caneau, C
Adesida, I
机构
[1] UNIV ILLINOIS, DEPT ELECT & COMP ENGN, URBANA, IL 61801 USA
[2] BELL COMMUN RES INC, RED BANK, NJ 07701 USA
关键词
high electron mobility transistors; carrier mobility;
D O I
10.1049/el:19960652
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The fabrication of 1.0 mu m gate length enhancement mode high electron mobility transistors (E-HEMTs) in the lattice matched LnAlAs/InGaAs/InP material system is reported. Typical device DC chacteristics include a threshold voltage of 275mV, transconductance of 650mS/mm, output conductance of 7.0mS/mm, and an off-state breakdown voltage of 16V. The devices exhibited excellent RF performance with an f(t) of 35GHz and an f(max) of 80GHz. For the first time, a process for E-HEMTs lattice matched to InP suitable for circuit applications is presented.
引用
收藏
页码:1037 / 1038
页数:2
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