A kinetic Monte Carlo method on super-lattices for the study of the defect formation in the growth of close packed structures

被引:50
作者
Camarda, Massimo [1 ]
La Magna, Antonino [1 ]
La Via, Francesco [1 ]
机构
[1] CNR, Ist Microelettron & Microsistemi, I-95121 Catania, Italy
关键词
Kinetic Lattice Monte Carlo; Island nucleation; defective epitaxial growth;
D O I
10.1016/j.jcp.2007.08.036
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
A modified Kinetic Lattice Monte Carlo model has been developed to predict growth rate regimes and defect formation in the case of the homo-epitaxial growth of close packed crystalline structures. The model is an improvement over standard Monte Carlo algorithms, which usually retain fixed atom positions and bond partners indicative of perfect crystal lattices. Indeed, we extend the concepts of Monte Carlo growth simulations on super-lattices containing additional sites (defect sites) with respect to those of the reference material. This extension implies a reconsideration of the energetic mapping, which is extensively presented, and allows to describe a complex phenomenology that is out of accessibility of standard stochastic approaches. Results obtained using the Kawasaki and the Bond-Counting rules for the transition probability of the Monte Carlo event are discussed in details. These results demonstrate how the defect types (local or extended), the formation mechanisms and the defect generation regimes can be characterized using our approach. (C) 2007 Elsevier Inc. All rights reserved.
引用
收藏
页码:1075 / 1093
页数:19
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