X-ray fine structure investigation of germanium nanoclusters

被引:5
作者
Blasing, J [1 ]
Kohlert, P [1 ]
Zacharias, M [1 ]
Veit, P [1 ]
机构
[1] Otto Von Guericke Univ, Inst Phys Expt, D-39016 Magdeburg, Germany
关键词
D O I
10.1107/S0021889898001071
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Germanium nanostructures embedded in amorphous SiOx matrices were investigated by different X-ray techniques. We report either randomly distributed or layer-organized arrangements of the nanoclusters or nanocrystals, depending on the sputtering conditions. Recrystallization was found to occur by annealing the films near the melting point of germanium.
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页码:589 / 593
页数:5
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