Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology

被引：54

作者：

Klunder, DJW

Krioukov, E

Tan, FS

Van Der Veen, T

Bulthuis, HF

Sengo, G

Otto, C

Hoekstra, HJWM

Driessen, A

机构：

[1] Univ Twente, Lightwave Devices Grp, MESA Res Inst, NL-7500 AE Enschede, Netherlands

[2] Univ Twente, Biophys Tech Grp, MESA Res Inst, NL-7500 AE Enschede, Netherlands

[3] Kymata Netherlands, NL-7521 PV Enschede, Netherlands

来源：

APPLIED PHYSICS B-LASERS AND OPTICS | 2001年 / 73卷 / 5-6期

关键词：

D O I：

10.1007/s003400100705

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High-finesse laterally and vertically waveguide-coupled cylindrical microresonators have been designed and realized in Si3N4 on SiO2 technology using conventional optical lithography. Based on the experimental results and detailed simulations, a comparison between the lateral and vertical coupling schemes is made.

引用

页码：603 / 608

页数：6

共 16 条

[11] Microring resonator arrays for VLSI photonics [J].