Effect of nitrogen contamination by crucible encapsulation on polycrystalline silicon material quality

被引:18
作者
Binetti, S [1 ]
Acciarri, M [1 ]
Savigni, C [1 ]
Brianza, A [1 ]
Pizzini, S [1 ]
Musinu, A [1 ]
机构
[1] DIPARTIMENTO SCI CHIM,I-09124 CAGLIARI,ITALY
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1996年 / 36卷 / 1-3期
关键词
nitrogen; silicon nitride;
D O I
10.1016/0921-5107(95)01268-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports some results about a recently discovered sourer of lifetime degradation found in polycrystalline silicon ingots grown in silicon-nitride-lined silica crucibles. A systematic analysis of the low lifetime areas, which preferentially are found corresponding to the ingot edges and corners, carried out using different structural, spectroscopical and electrical techniques, shows that the lifetime drop is associated with the presence of a high density of silicon nitride and iron silicide submicrometre particles, revealed by transmission electron microscopy and electron diffraction measurements. An at least partial recovery of the lifetime is obtained by P gettering at 900 degrees C, which seems to be effective in dissolving the iron silicide from the nitride-rich areas.
引用
收藏
页码:68 / 72
页数:5
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