Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films

被引：130

作者：

Dwivedi, Neeraj ^{[1
,2
]}

Kumar, Sushil ^{[1
]}

Malik, H. K. ^{[2
]}

Govind ^{[3
]}

Rauthan, C. M. S. ^{[1
]}

Panwar, O. S. ^{[1
]}

机构：

[1] CSIR, Natl Phys Lab, Phys Energy Harvesting Div, New Delhi 110001, India

[2] Indian Inst Technol Delhi, Dept Phys, New Delhi 110016, India

[3] CSIR, Natl Phys Lab, Surface Phys & Nano Struct Grp, New Delhi 110012, India

来源：

APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 15期

关键词：

XPS; Electrical properties; Mechanical properties; Optical properties; A-C-H; ELECTRONIC-PROPERTIES; NITRIDE FILMS; TRANSPORT; NITROGEN; SURFACE; PHOTOELECTRON; CONDUCTIVITY; DEPENDENCE; DEPOSITION;

D O I：

10.1016/j.apsusc.2011.02.134

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In the present work the correlation of electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon (Ar-DLC) thin films with sp(3) and sp(2) fractions of carbon have been explored. These Ar-DLC thin films have been deposited, under varying C2H2 gas pressures from 25 to 75 mTorr, by radio frequency-plasma enhanced chemical vapor deposition technique. X-ray photoelectron spectroscopy studies are performed to estimate the sp(3) and sp(2) fractions of carbon by deconvoluting C 1s core level spectra. Various electrical, optical and nano-mechanical parameters such as conductivity, I-V characteristics, optical band gap, stress, hardness, elastic modulus, plastic resistance parameter, elastic recovery and plastic deformation energy have been estimated and then correlated with calculated sp(3) and sp(2) fractions of carbon and sp(3)/sp(2) ratios. Observed tremendous electrical, optical and nano-mechanical properties in Ar-DLC films deposited under high base pressure conditions made it a cost effective material for not only hard and protective coating applications but also for electronic and optoelectronic applications. (C) 2011 Elsevier B. V. All rights reserved.

引用

页码：6804 / 6810

页数：7

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