Direct growth of amorphous silica nanowires by solid state transformation of SiO2 films

被引:48
作者
Lee, KH [1 ]
Yang, HS
Baik, KH
Bang, J
Vanfleet, RR
Sigmund, W
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Univ Cent Florida, Adv Mat Proc & Anal Ctr, Orlando, FL 32816 USA
关键词
D O I
10.1016/j.cplett.2003.11.056
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Amorphous silica nanowires (a-SiONWs) were produced by direct solid state transformation from silica films. The silica nanowires grow on TiN/Ni/SiO2/Si substrates during the annealing in H-2 or a H-2:CH4 mixture at 1050 degreesC. Titanium nitride (TiN) films were used to induce a solid state reaction with silica (SiO2) films on silicon wafers to provide silicon atoms into growing nanowires. The TiN layers induce the diffusion of silicon and oxygen to the surface by a stress gradient built inside the films. The nickel diffuses to the surface during the TiN deposition and acts as a nucleation site for the a-SiONWs. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:380 / 384
页数:5
相关论文
共 10 条
  • [1] Duan XF, 2000, ADV MATER, V12, P298, DOI 10.1002/(SICI)1521-4095(200002)12:4<298::AID-ADMA298>3.0.CO
  • [2] 2-Y
  • [3] Structural change of TiN/Ti/SiO2 multilayers by N2 annealing
    Hamamura, H
    Itoh, H
    Shimogaki, Y
    Aoyama, J
    Yoshimi, T
    Ueda, J
    Komiyama, H
    [J]. THIN SOLID FILMS, 1998, 320 (01) : 31 - 34
  • [4] Room-temperature ultraviolet nanowire nanolasers
    Huang, MH
    Mao, S
    Feick, H
    Yan, HQ
    Wu, YY
    Kind, H
    Weber, E
    Russo, R
    Yang, PD
    [J]. SCIENCE, 2001, 292 (5523) : 1897 - 1899
  • [5] A laser ablation method for the synthesis of crystalline semiconductor nanowires
    Morales, AM
    Lieber, CM
    [J]. SCIENCE, 1998, 279 (5348) : 208 - 211
  • [6] PEN ZW, 2002, J AM CHEM SOC, V124, P817
  • [7] Amorphous silicon-carbon alloys: a promising but complex and very diversified series of materials
    Solomon, I
    [J]. APPLIED SURFACE SCIENCE, 2001, 184 (1-4) : 3 - 7
  • [8] Preparation and photoluminescence properties of amorphous silica nanowires
    Wu, XC
    Song, WH
    Wang, KY
    Hu, T
    Zhao, B
    Sun, YP
    Du, JJ
    [J]. CHEMICAL PHYSICS LETTERS, 2001, 336 (1-2) : 53 - 56
  • [9] Growth of amorphous silicon nanowires via a solid-liquid-solid mechanism
    Yan, HF
    Xing, YJ
    Hang, QL
    Yu, DP
    Wang, YP
    Xu, J
    Xi, ZH
    Feng, SQ
    [J]. CHEMICAL PHYSICS LETTERS, 2000, 323 (3-4) : 224 - 228
  • [10] Amorphous silica nanowires: Intensive blue light emitters
    Yu, DP
    Hang, QL
    Ding, Y
    Zhang, HZ
    Bai, ZG
    Wang, JJ
    Zou, YH
    Qian, W
    Xiong, GC
    Feng, SQ
    [J]. APPLIED PHYSICS LETTERS, 1998, 73 (21) : 3076 - 3078