Theoretical approximation of energy distribution of elastically recoiled hydrogen atoms

One of the most important characteristics in depth profiling using ion beam analysis (IBA) is energy (or depth) resolution. A computer code, DEPTH, was developed to calculate the above values for different IBA methods. In this paper it will be shown that DEPTH can calculate accurately also the shape of the energy distribution of the detected ions. Examples will be given for the elastic recoil detection analysis (ERDA) performed at reflection geometry. This is one of the most complicated cases, since here multiple scattering effects are also significant because of the applied glancing incidence and detection angles. To investigate these effects experimentally samples containing thin double layers of Al, Cu, Ag and Au separated by interfacial hydrogenated amorphous carbon films were prepared and measured by ERDA using He ions. (C) 1998 Elsevier Science B.V.