OPTIMIZATION OF THE DEPTH RESOLUTION IN ERDA OF H USING C-12 IONS

被引：16

作者：

SZILAGYI, E ^{[1
]}

PASZTI, F ^{[1
]}

QUILLET, V ^{[1
]}

ABEL, F ^{[1
]}

机构：

[1] UNIV PARIS 07,PHYS SOLIDES GRP,CNRS,URA 17,F-75251 PARIS 05,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 85卷 / 1-4期

基金：

匈牙利科学研究基金会;

关键词：

D O I：

10.1016/0168-583X(94)95787-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilagyi and F. Paszti, these Proceedings (IBA-11, Balatonfured, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilagyi, F. Paszti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a C-12 beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.

引用

页码：63 / 67

页数：5

共 12 条

[1] ABSOLUTE CROSS-SECTION FOR HYDROGEN FORWARD SCATTERING [J].

BAGLIN, JEE ;

KELLOCK, AJ ;

CROCKETT, MA ;

SHIH, AH .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :469-474

[2] HYDROGEN ANALYSIS AS A FUNCTION OF DEPTH FOR HYDROGENOUS FILMS AND POLYMERS BY PROTON RECOIL DETECTION [J].

INGRAM, DC ;

MCCORMICK, AW ;

PRONKO, PP ;

CARLSON, JD ;

WOOLLAM, JA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :430-434

[3] COMPUTER METHODS FOR ANALYSIS AND SIMULATION OF RBS AND ERDA SPECTRA [J].

KOTAI, E .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4) :588-596

[4]

KOTAI E, 1993, IBA11 BAL

[5] H IN TI THIN-FILMS [J].

KRIST, T ;

BRIERE, M ;

CSER, L .

THIN SOLID FILMS, 1993, 228 (1-2) :141-144

[6] STOPPING POWER AND ENERGY STRAGGLING FOR SMALL AND LARGE ENERGY-LOSSES OF MEV PROTONS TRANSMITTED THROUGH POLYESTER FILMS [J].

LHOIR, A ;

SCHMAUS, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) :1-12

[7] DEPTH RESOLUTION AND RECOIL CROSS-SECTION FOR ANALYZING HYDROGEN IN SOLIDS USING ELASTIC RECOIL DETECTION WITH HE-4 BEAM [J].

NAGATA, S ;

YAMAGUCHI, S ;

FUJINO, Y ;

HORI, Y ;

SUGIYAMA, N ;

KAMADA, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (03) :533-537

[8] OPTIMIZATION OF THE DEPTH RESOLUTION IN ELASTIC RECOIL DETECTION [J].

PASZTI, F ;

SZILAGYI, E ;

KOTAI, E .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 54 (04) :507-512

[9] THEORETICAL CALCULATION OF THE DEPTH RESOLUTION OF IBA METHODS [J].

SZILAGYI, E ;

PASZTI, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4) :616-620

[10]

SZILAGYI E, IN PRESS NUCL INST B

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