Fibrous and porous microstructure formation in 6H-SiC by anodization in HF solution

被引：19

作者：

Shin, W ^{[1
]}

Hikosaka, T

Seo, WS

Ahn, HS

Sawaki, N

Koumoto, K

机构：

[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Nagoya, Aichi 4648603, Japan

[2] Nagoya Univ, Grad Sch Engn, Dept Elect, Nagoya, Aichi 4648603, Japan

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1998年 / 145卷 / 07期

关键词：

D O I：

10.1149/1.1838659

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The anodization reaction of 6H-SiC using HF solution was investigated to understand the formation of porous SiC. The anodization reaction proceeds via two Stages in which the oxidation of:SIC is followed by the removal of SiO by fluorine ions. The microstructure of porous SiC changes fi om fibrous-to dendritic as the anodization current is increased, and also shows other transitional morphology. The photoluminescence of these porous SiC with different microstructures was also investigated, and the photoluminescence band of higher energy was found to become enhanced as the microstructure of porous SiC changed from fibrous to porous dendritic.

引用

页码：2456 / 2460

页数：5

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