New realization method for three-dimensional photonic crystal in the optical wavelength region: Experimental consideration

被引：38

作者：

Yamamoto, N

Noda, S

Sasaki, A

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 3B期

关键词：

three-dimensional photonic crystal; optical wavelength region; wafer-bonding; micromachining;

D O I：

10.1143/JJAP.36.1907

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We experimentally investigate the feasibility of a realization method for the three-dimensional photonic crystal in the optical wavelength region. Micromachining techniques of dry-etching, wafer-bonding and laser beam diffraction pattern observation techniques are utilized. Each process is investigated using an AlGaAs/GaAs semiconductor system, and the feasibility of this method is successfully demonstrated for a structure having a photonic bandgap in the 10 mu m wavelength region.

引用

页码：1907 / 1911

页数：5

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