Electrothermal microgrippers for pick-and-place operations

被引：32

作者：

Andersen, Karin. N. ^{[1
]}

Carlson, Kenneth ^{[1
]}

Petersen, Dirch H. ^{[1
]}

Molhave, Kristian ^{[1
]}

Eichhorn, Volkmar ^{[2
]}

Fatikow, Sergej ^{[2
]}

Boggild, Peter ^{[1
]}

机构：

[1] NanoDTU, MIC, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

[2] Carl von Ossietzky Univ Oldenburg, Div Microrobot & Control Engn, D-26111 Oldenburg, Germany

来源：

MICROELECTRONIC ENGINEERING | 2008年 / 85卷 / 5-6期

关键词：

microgrippers; nanomanipulation; carbon nanotubes; atomic force microscopy; pick-and-place;

D O I：

10.1016/j.mee.2007.12.080

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Manipulation of carbon nanotubes to assemble functional devices can be done inside a scanning electron microscope in which a suitable combination of visual resolution and sample space allows macroscale manipulators with micro- or nanoscale precision to be incorporated, yet monitored with nm-scale precision. The pick-and-place procedure can be done in several ways. We present here a monolithic electrothermal microgripper, and demonstrate pick-and-place of an as-grown carbon nanotube from a 2D array onto a scanning probe tip, as a first step towards a reliable and precise pick-and-place process for carbon nanotubes. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：1128 / 1130

页数：3

共 10 条

[1] Fabrication and actuation of customized nanotweezers with a 25 nm gap [J].

Boggild, P ;

Hansen, TM ;

Tanasa, C ;

Grey, F .

NANOTECHNOLOGY, 2001, 12 (03) :331-335

[2] A carbon nanofibre scanning probe assembled using an electrothermal microgripper [J].

Carlson, K. ;

Andersen, K. N. ;

Eichhorn, V. ;

Petersen, D. H. ;

Molhave, K. ;

Bu, I. Y. Y. ;

Teo, K. B. K. ;

Milne, W. I. ;

Fatikow, S. ;

Boggild, P. .

NANOTECHNOLOGY, 2007, 18 (34)

[3]

FATIKOW S, 2006, IEEE MED C CONTR AUT

[4] POLYSILICON MICROGRIPPER [J].

KIM, CJ ;

PISANO, AP ;

MULLER, RS ;

LIM, MG .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) :221-227

[5] Nanotube nanotweezers [J].

Kim, P ;

Lieber, CM .

SCIENCE, 1999, 286 (5447) :2148-2150

[6]

MADSEN DN, 2003, J NANOTECHNOLOGY, V1, P335

[7] Towards pick-and-place assembly of nanostructures [J].

Molhave, K ;

Hansen, TM ;

Madsen, DN ;

Boggild, P .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2004, 4 (03) :279-282

[8]

MOLHAVE K, 2005, J MICROMECH MICROENG, V15, P165

[9] Pick-and-place nanomanipulation using microfabricated grippers [J].

Molhave, Kristian ;

Wich, Thomas ;

Kortschack, Axel ;

Boggild, Peter .

NANOTECHNOLOGY, 2006, 17 (10) :2434-2441

[10] Large-scale fabrication of carbon nanotube probe tips for atomic force microscopy critical dimension Imaging applications [J].

Ye, Q ;

Cassell, AM ;

Liu, HB ;

Chao, KJ ;

Han, J ;

Meyyappan, M .

NANO LETTERS, 2004, 4 (07) :1301-1308

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