Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry

被引：130

作者：

Siewert, Frank ^{[1
]}

Buchheim, Jana ^{[1
]}

Boutet, Sebastien ^{[2
]}

Williams, Garth J. ^{[2
]}

Montanez, Paul A. ^{[2
]}

Krzywinski, Jacek ^{[2
]}

Signorato, Riccardo ^{[3
]}

机构：

[1] Helmholtz Zentrum Berlin, BESSY 2, Inst Nanometre Opt & Technol, D-12489 Berlin, Germany

[2] SLAC Natl Accelerator Lab, Linac Coherent Light Source, Menlo Pk, CA 94025 USA

[3] Bruker ASC GmbH, D-51429 Bergisch Gladbach, Germany

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 04期

关键词：

SPECIFICATION;

D O I：

10.1364/OE.20.004525

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present recent results on the inspection of a first diffraction-limited hard X-ray Kirkpatrick-Baez (KB) mirror pair for the Coherent X-ray Imaging (CXI) instrument at the Linac Coherent Light Source (LCLS). The full KB system - mirrors and holders - was under inspection by use of high resolution slope measuring deflectometry. The tests confirmed that KB mirrors of 350mm aperture length characterized by an outstanding residual figure error of <1 nm rms has been realized. This corresponds to the residual figure slope error of about 0.05 mu rad rms, unprecedented on such long elliptical mirrors. Additional measurements show the clamping of the mirrors to be a critical step for the final - shape preserving installation of such outstanding optics. (C)2011 Optical Society of America

引用

页码：4525 / 4536

页数：12

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