Calibration of displacement sensors up to 300 μm with nanometre accuracy and direct traceability to a primary standard of length

A new class of sensor has recently appeared: nanometre sensors. These sensors are characterized by nanometre or sub-nanometre resolution and an uncertainty of a few nanometres over a range of at least several micrometres. Instruments such as capacitive or inductive sensors, laser interferometers, holographic scales, and scanning probe microscopes belong to the class of nanometre sensors. Linearity errors and drift in the mechanical and electronic system limit the accuracy of all these sensors. In order to determine these errors in a traceable way, the instrumentation described in this paper was developed. The heart of the system consists of a Fabry-Perot cavity. One mirror of this cavity generates the required displacement. A so-called slave laser is stabilized to the cavity length. The frequency of this slave laser is compared with the frequency of a primary length standard. In this way the displacement is measured with a resolution of a few picometres, a range of 300 mu m and an uncertainty of about 1 nm. Experiments confirm the performance of this instrument and show typical deviations of the probe systems investigated.