Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide

被引:40
作者
Bonse, Joern [1 ]
Bachelier, Guillaume [2 ,4 ]
Siegel, Jan [2 ]
Solis, Javier [2 ]
Sturm, Heinz [3 ]
机构
[1] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12489 Berlin, Germany
[2] CSIC, Inst Opt, Laser Proc Grp, E-28006 Madrid, Spain
[3] Bundesanstalt Mat Forsch & Prufung, D-12205 Berlin, Germany
[4] Univ Lyon 1, Spectrometrie Ion & Mol Lab, CNRS, UMR 5579, F-69622 Villeurbanne, France
关键词
D O I
10.1063/1.2885105
中图分类号
O59 [应用物理学];
学科分类号
摘要
Femtosecond time-resolved microscopy has been used to analyze the structural transformation dynamics (melting, ablation, and solidification phenomena) induced by single intense 130 fs laser pulses in single-crystalline (100)-indium phosphide wafers in air on a time scale from similar to 100 fs up to 8 ns. In the ablative regime close to the ablation threshold, transient surface reflectivity patterns are observed by fs microscopy on a ps to ns time scale as a consequence of the complex spatial density structure of the ablating material (dynamic Newton fringes). At higher fluences, exceeding six times the ablation threshold, optical breakdown causes another, more violent ablation regime, which reduces the energy deposition depth along with the time of significant material removal. As a consequence, ablation lasts longer in a ring-shaped region around the region of optical breakdown. This leads to the formation of a crater profile with a central protrusion. In the melting regime below the ablation threshold, the melting dynamics of indium phosphide has been quantified and subsequent superficial amorphization has been observed upon solidification on the ns time scale leading to amorphous layer thicknesses of the order of a few tens of nanometers. (C) 2008 American Institute of Physics.
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页数:6
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