Femtosecond laser irradiation of indium phosphide in air: Raman spectroscopic and atomic force microscopic investigations

被引:55
作者
Bonse, J
Wrobel, JM
Brzezinka, KW
Esser, N
Kautek, W
机构
[1] Univ Siegen, Inst Phys Chem 1, D-57068 Siegen, Germany
[2] Univ Missouri, Dept Phys, Kansas City, MO 64110 USA
[3] Bundesanstalt Mat Forsch & Prufung, BAM, Lab Schwingungsspektroskopie, D-12205 Berlin, Germany
[4] Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany
[5] Bundesanstalt Mat Forsch & Prufung, BAM, Lab Dunnschichttechnologien, D-12205 Berlin, Germany
关键词
femtosecond laser ablation; indium phosphide; Raman spectroscopy; atomic force microscopy;
D O I
10.1016/S0169-4332(02)00948-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Surface modification and ablation of crystalline indium phosphide was performed with single and double 130 fs pulses from a Ti:sapphire laser. The morphological features resulting from laser processing, have been investigated by means of micro Raman spectroscopy as well as by optical, atomic force and scanning electron microscopy. The studies indicate amorphous, ablated and recrystallized zones on the processed surface. In the single-pulse irradiation experiments, several different threshold fluences could be assigned to the processes of melting, ablation and polycrystalline resolidification. Residual stress has been detected within the irradiated areas. Double-pulse exposure experiments have been analyzed in order to clarify the effect of cumulative damage in the ablation process of indium phosphide. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码:272 / 282
页数:11
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