CHARACTERIZATION OF IMPLANTATION AND ANNEALING OF ZN-IMPLANTED INP BY RAMAN-SPECTROMETRY

被引:37
作者
BEDEL, E [1 ]
LANDA, G [1 ]
CARLES, R [1 ]
RENUCCI, JB [1 ]
ROQUAIS, JM [1 ]
FAVENNEC, PN [1 ]
机构
[1] CTR NATL ETUD TELECOMMUN,F-22301 LANNION,FRANCE
关键词
D O I
10.1063/1.337199
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1980 / 1984
页数:5
相关论文
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