Polymer-based multi-layer conductive electrode film for plastic LCD applications

被引:22
作者
Kim, JY [1 ]
Sohn, D [1 ]
Kim, ER [1 ]
机构
[1] Hanyang Univ, Coll Nat Sci, Dept Chem, Seoul 133791, South Korea
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 72卷 / 06期
关键词
D O I
10.1007/s003390100853
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of polymer-based multi-layer conductive electrode to be used as a substrate for a plastic liquid crystal display (LCD) have been prepared by a DC magnetron roll-to-roll sputtering method. The conductive layer is composed of three layers, ITO/Ag/ITO or ITO/APC/ITO, where APC is Ag-Pd-Cu alloy, on the polymer substrate (Arton (R)), which has been treated with hard-coat and gas-barrier layers. The properties of the conductive electrode for the plastic LCD were the following: (1) sheet resistance is 6 Ohm /square; (2) transparency is 88% at 550 nm; (3) H2O gas permeation through the plastics is 0.35 g/m(2) in 24 h; (4) durability against solvents is good for 5% NaOH solution, IPA, methanol, NMP, acetone, etc.; (5) the irreversible shrinkage and the compaction rate are both less than 3 ppm/h after annealing for 100h at 150 degreesC.
引用
收藏
页码:699 / 704
页数:6
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