Mechanism of interstitial oxygen diffusion in hafnia

被引:130
作者
Foster, AS
Shluger, AL
Nieminen, RM
机构
[1] Aalto Univ, Phys Lab, Helsinki 02015, Finland
[2] UCL, Dept Phys & Astron, London WC1E 6BT, England
关键词
D O I
10.1103/PhysRevLett.89.225901
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We have performed density functional calculations of oxygen incorporation and diffusion in monoclinic hafnia (HfO2) for a range of oxygen charge states. The calculations demonstrate that oxygen favors atomic incorporation and that O2- is the most stable species. We find that oxygen interstitials diffuse via exchange with lattice oxygen sites in hafnia, and that O- species have the smallest diffusion barrier.
引用
收藏
页码:225901 / 225901
页数:4
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