Characterization of SnO2-based H-2 gas sensors fabricated by different deposition techniques

被引:69
作者
Ansari, SG [1 ]
Gosavi, SW [1 ]
Gangal, SA [1 ]
Karekar, RN [1 ]
Aiyer, RC [1 ]
机构
[1] UNIV PUNE,DEPT ELECT SCI,PUNE 411007,MAHARASHTRA,INDIA
关键词
D O I
10.1023/A:1018544702391
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thick and thin films of SnO2 are extensively used for resistive gas sensors. Characteristics are compared for films produced by four different techniques - chemical vapour deposition (CVD), spray pyrolysis, vacuum evaporation and screen printing. The films are characterized for Hp sensing only, using a static measurement system to investigate their temperature selectivity. The samples are tested at a concentration of 300 p.p.m. H-2 gas, a typical value for comparison. No selective peak is observed for CVD and spray deposited samples, and the selective peak for vacuum evaporated samples has a low sensitivity. But the selective peak for screen printed samples has a sensitivity of 55% (delta R/R(air)). And what is more, the screen printed samples have a repeatable response.
引用
收藏
页码:23 / 27
页数:5
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