共 9 条
[2]
GRABIEC PB, 1996, MICROELECTRONIC ENG, V35, P329
[3]
Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1996, 14 (02)
:856-860
[5]
Rangelow IW, 1996, P SOC PHOTO-OPT INS, V2879, P56, DOI 10.1117/12.251232
[7]
*SILVACO INT, 1997, ATHENA ATLAS USERS M
[8]
Tortonese M., 1991, IEEE PUBLICATION, P448
[9]
Dry etching with gas chopping without rippled sidewalls
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
:2768-2771