Evaluation and fabrication of AFM array for ESA-Midas /Rosetta space mission

被引:13
作者
Barth, W
Debski, T
Abedinov, N
Ivanov, T
Heerlein, H
Volland, B
Gotszalk, T
Rangelow, IW
Torkar, K
Fritzenwallner, K
Grabiec, P
Studzinska, K
Kostic, I
Hudek, P
机构
[1] Univ Kassel, Inst Technol Phys, IMA, FB 18, D-34132 Kassel, Germany
[2] Austrian Acad Sci, Inst Space Res, A-80310 Graz, Austria
[3] Inst Electr Mat Technol, PL-02668 Warsaw, Poland
[4] Slovak Acad Sci, SK-84237 Bratislava, Slovakia
关键词
atomic force microscopy; atomic force microscopy space application; piezoresistive cantilever sensors;
D O I
10.1016/S0167-9317(01)00558-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The MIDAS (Micro-Imaging Dust Analysis System) experiment is dedicated to the micro-textural and statistical analysis of cometary dust particles. The instrument is based on the technique of atomic force microscopy. The comparative simplicity and robustness of the technique lends itself to advanced space applications. The instrument is considered as essential for this mission since, for the first time, it has the capability of three-dimensional imaging of interplanetary and pristine cometary particles in the manometer to micrometer range. In this paper we describe our effort to evaluate and fabricate the AFM arrays for the ESA-Midas/Rosetta space mission. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:825 / 831
页数:7
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