Diamond-like carbon film synthesized by ion beam assisted deposition and its tribological properties

被引：37

作者：

He, XM

Li, WZ

Li, HD

机构：

[1] Dept. of Mat. Sci. and Engineering, Tsinghua University

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1996年 / 14卷 / 04期

关键词：

D O I：

10.1116/1.580079

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ion beam assisted deposition offers a novel and unique process to prepare diamond-like carbon (DLC) films at room temperature with particularly good interface adhesion. This advantage is explored to deposit highly wear resistant DLC coating on AISI 52100 steel. Various bombarding species and energy are examined to optimize the process. Infrared, Raman, Auger electron spectroscopy spectra, and hardness measurements are used to characterize the structure and properties of DLC films. The friction and wear behavior of DLC films are systematically investigated by performing extensive experiments in different testing styles. It is disclosed that by means of a dynamic mixing of atoms in interfaces, a pure metal intermediate layer can tremendously improve the tribological properties of DLC films on 52100 steel. The results are optimistic and may lead to useful applications. (C) 1996 American Vacuum Society.

引用

页码：2039 / 2047

页数：9

共 14 条

[1] FRICTION REDUCTION BY ION-BEAM-INDUCED VACUUM CARBURIZATION OF STEEL MATERIALS [J].

BRAUN, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) :544-547

[2]

Dimigen H., 1983, Philips Technical Review, V41, P186

[3] METAL-CARBON LAYERS FOR INDUSTRIAL APPLICATION IN THE AUTOMOTIVE INDUSTRY [J].

GUTTLER, J ;

RESCHKE, J .

SURFACE & COATINGS TECHNOLOGY, 1993, 60 (1-3) :531-535

[4] INVESTIGATION OF DIAMOND-LIKE CARBON THIN-FILMS SYNTHESIZED BY DUAL-ION BEAM ASSISTED DEPOSITION [J].

HE, XM ;

LI, WZ ;

LI, HD ;

FAN, YD .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (04) :528-532

[5] STRUCTURAL CHARACTERIZATION AND PROPERTIES ENHANCEMENT OF DIAMOND-LIKE CARBON-FILMS SYNTHESIZED UNDER LOW-ENERGY NE+ BOMBARDMENT [J].

HE, XM ;

LI, WZ ;

LI, HD .

[6] BONDING STRUCTURE AND TRIBOLOGICAL PROPERTIES OF DLC FILMS SYNTHESIZED BY DUAL-ION BEAM SPUTTERING [J].

HE, XM ;

LI, WZ ;

LI, HD .

VACUUM, 1994, 45 (09) :977-980

[7] STRUCTURE AND TRIBOLOGY OF HARD CARBON-FILMS SYNTHESIZED BY ION-BEAM DEPOSITION [J].

HE, XM ;

LI, WZ ;

LI, HD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (06) :2964-2969

[8] COMMERCIAL APPLICATIONS OF ION-BEAM DEPOSITED DIAMOND-LIKE CARBON (DLC) COATINGS [J].

KIMOCK, FM ;

KNAPP, BJ .

SURFACE & COATINGS TECHNOLOGY, 1993, 56 (03) :273-279

[9] TRIBOLOGICAL PERFORMANCE OF HARD CARBON COATINGS ON 440C BEARING STEEL [J].

KUSTAS, FM ;

MISRA, MS ;

SHEPARD, DF ;

FROECHTENIGT, JF .

SURFACE & COATINGS TECHNOLOGY, 1991, 48 (02) :113-119

[10] ENGINEERING APPLICATIONS FOR DIAMOND-LIKE CARBON [J].

MATTHEWS, A ;

ESKILDSEN, SS .

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