Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators

被引:109
作者
Bargatin, I. [1 ]
Kozinsky, I. [1 ]
Roukes, M. L. [1 ]
机构
[1] CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA
关键词
D O I
10.1063/1.2709620
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors observed resonances from multiple vibrational modes of individual silicon-carbide-based nanomechanical resonators, covering a broad frequency range from several megahertz to over a gigahertz. The devices are actuated thermoelastically in vacuum at room temperature using localized Joule heating in a device-integrated metal loop. Their motion is detected piezoresistively using signal downmixing in a similarly integrated metal piezoresistor. The frequencies and amplitudes of the observed resonant peaks are in good agreement with the results from theoretical modeling and finite-element simulations. (c) 2007 American Institute of Physics.
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页数:3
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共 23 条
[1]   A high-speed atomic force microscope for studying biological macromolecules [J].
Ando, T ;
Kodera, N ;
Takai, E ;
Maruyama, D ;
Saito, K ;
Toda, A .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2001, 98 (22) :12468-12472
[2]   Sensitive detection of nanomechanical motion using piezoresistive signal downmixing [J].
Bargatin, I ;
Myers, EB ;
Arlett, J ;
Gudlewski, B ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 2005, 86 (13) :1-3
[3]   Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals [J].
Cleland, AN ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 1996, 69 (18) :2653-2655
[4]   Enhanced functionality of cantilever based mass sensors using higher modes [J].
Dohn, S ;
Sandberg, R ;
Svendsen, W ;
Boisen, A .
APPLIED PHYSICS LETTERS, 2005, 86 (23) :1-3
[5]   High-sensitivity piezoresistive cantilevers under 1000 Å thick [J].
Harley, JA ;
Kenny, TW .
APPLIED PHYSICS LETTERS, 1999, 75 (02) :289-291
[6]   Megahertz silicon atomic force microscopy (AFM) cantilever and high-speed readout in AFM-based recording [J].
Hosaka, S ;
Etoh, K ;
Kikukawa, A ;
Koyanagi, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01) :94-99
[7]   Optical excitation of nanoelectromechanical oscillators [J].
Ilic, B ;
Krylov, S ;
Aubin, K ;
Reichenbach, R ;
Craighead, HG .
APPLIED PHYSICS LETTERS, 2005, 86 (19) :1-3
[8]   Mechanical properties of epitaxial 3C silicon carbide thin films [J].
Jackson, KM ;
Dunning, J ;
Zorman, CA ;
Mehregany, M ;
Sharpe, WN .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (04) :664-672
[9]   SiC cantilever resonators with electrothermal actuation [J].
Jiang, L ;
Cheung, R ;
Hedley, J ;
Hassan, M ;
Harris, AJ ;
Burdess, JS ;
Mehregany, M ;
Zorman, CA .
SENSORS AND ACTUATORS A-PHYSICAL, 2006, 128 (02) :376-386
[10]   Nanometre-scale displacement sensing using a single electron transistor [J].
Knobel, RG ;
Cleland, AN .
NATURE, 2003, 424 (6946) :291-293