Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators

被引：109

作者：

Bargatin, I. ^{[1
]}

Kozinsky, I. ^{[1
]}

Roukes, M. L. ^{[1
]}

机构：

[1] CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 09期

关键词：

D O I：

10.1063/1.2709620

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors observed resonances from multiple vibrational modes of individual silicon-carbide-based nanomechanical resonators, covering a broad frequency range from several megahertz to over a gigahertz. The devices are actuated thermoelastically in vacuum at room temperature using localized Joule heating in a device-integrated metal loop. Their motion is detected piezoresistively using signal downmixing in a similarly integrated metal piezoresistor. The frequencies and amplitudes of the observed resonant peaks are in good agreement with the results from theoretical modeling and finite-element simulations. (c) 2007 American Institute of Physics.

引用

收藏

页数：3

相关论文

共 23 条

[1] A high-speed atomic force microscope for studying biological macromolecules [J].

Ando, T ;

Kodera, N ;

Takai, E ;

Maruyama, D ;

Saito, K ;

Toda, A .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2001, 98 (22) :12468-12472

[2] Sensitive detection of nanomechanical motion using piezoresistive signal downmixing [J].

Bargatin, I ;

Myers, EB ;

Arlett, J ;

Gudlewski, B ;

Roukes, ML .

APPLIED PHYSICS LETTERS, 2005, 86 (13) :1-3

[3] Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals [J].

Cleland, AN ;

Roukes, ML .

APPLIED PHYSICS LETTERS, 1996, 69 (18) :2653-2655

[4] Enhanced functionality of cantilever based mass sensors using higher modes [J].

Dohn, S ;

Sandberg, R ;

Svendsen, W ;

Boisen, A .

APPLIED PHYSICS LETTERS, 2005, 86 (23) :1-3

[5] High-sensitivity piezoresistive cantilevers under 1000 Å thick [J].

Harley, JA ;

Kenny, TW .

APPLIED PHYSICS LETTERS, 1999, 75 (02) :289-291

[6] Megahertz silicon atomic force microscopy (AFM) cantilever and high-speed readout in AFM-based recording [J].

Hosaka, S ;

Etoh, K ;

Kikukawa, A ;

Koyanagi, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01) :94-99

[7] Optical excitation of nanoelectromechanical oscillators [J].

Ilic, B ;

Krylov, S ;

Aubin, K ;

Reichenbach, R ;

Craighead, HG .

APPLIED PHYSICS LETTERS, 2005, 86 (19) :1-3

[8] Mechanical properties of epitaxial 3C silicon carbide thin films [J].

Jackson, KM ;

Dunning, J ;

Zorman, CA ;

Mehregany, M ;

Sharpe, WN .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (04) :664-672

[9] SiC cantilever resonators with electrothermal actuation [J].

Jiang, L ;

Cheung, R ;

Hedley, J ;

Hassan, M ;

Harris, AJ ;

Burdess, JS ;

Mehregany, M ;

Zorman, CA .

SENSORS AND ACTUATORS A-PHYSICAL, 2006, 128 (02) :376-386

[10] Nanometre-scale displacement sensing using a single electron transistor [J].

Knobel, RG ;

Cleland, AN .

NATURE, 2003, 424 (6946) :291-293