Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators

被引：113

作者：

Bargatin, I. ^{[1
]}

Kozinsky, I. ^{[1
]}

Roukes, M. L. ^{[1
]}

机构：

[1] CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 09期

关键词：

D O I：

10.1063/1.2709620

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors observed resonances from multiple vibrational modes of individual silicon-carbide-based nanomechanical resonators, covering a broad frequency range from several megahertz to over a gigahertz. The devices are actuated thermoelastically in vacuum at room temperature using localized Joule heating in a device-integrated metal loop. Their motion is detected piezoresistively using signal downmixing in a similarly integrated metal piezoresistor. The frequencies and amplitudes of the observed resonant peaks are in good agreement with the results from theoretical modeling and finite-element simulations. (c) 2007 American Institute of Physics.

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