Multimode laser Fizeau interferometer for measuring the surface of a thin transparent plate

被引:16
作者
Ai, CY
机构
[1] WYKO Corporation, Tucson, AZ, 85706 7123
关键词
Fizeau interferometer; optical testing; phase-shift interferometry; laser diode; glass disk;
D O I
10.1364/AO.36.008135
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A Fizeau interferometer utilizes a multimode laser as a light source for testing thin transparent plate samples. As a result of multimode linear laser operation, interference fringes are obtained only when the optical path difference between two surfaces is equal to twice a multiple of the laser's effective cavity length. For three parallel surfaces, we can either adjust their separations or select a laser such that only two of the three surfaces meet the requirement of twice a multiple of the laser's effective cavity length. (C) 1997 Optical Society of America.
引用
收藏
页码:8135 / 8138
页数:4
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