Trap characterization by gate-drain conductance and capacitance dispersion studies of an AlGaN/GaN heterostructure field-effect transistor

被引:113
作者
Miller, EJ [1 ]
Dang, XZ
Wieder, HH
Asbeck, PM
Yu, ET
Sullivan, GJ
Redwing, JM
机构
[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA
[2] Rockwell Int Sci Ctr, Thousand Oaks, CA 91358 USA
[3] Epitron ATMI, Phoenix, AZ 85027 USA
关键词
D O I
10.1063/1.373499
中图分类号
O59 [应用物理学];
学科分类号
摘要
Gate-drain capacitance and conductance measurements were performed on an Al0.15Ga0.85N/GaN heterostructure field-effect transistor to study the effects of trap states on frequency-dependent device characteristics. By varying the measurement frequency in addition to the bias applied to the gate, the density and time constants of the trap states have been determined as functions of gate bias. Detailed analysis of the frequency-dependent capacitance and conductance data was performed assuming models in which traps are present at the heterojunction (interface traps), in the AlGaN barrier layer (bulk traps), and at the gate contact (metal-semiconductor traps). Bias-dependent measurements were performed at voltages in the vicinity of the transistor threshold voltage, yielding time constants on the order of 1 mu s and trap densities of approximately 10(12) cm(-2) eV(-1). (C) 2000 American Institute of Physics. [S0021-8979(00)01711-4].
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页码:8070 / 8073
页数:4
相关论文
共 18 条
[1]   A UNIVERSAL TREND IN THE BINDING-ENERGIES OF DEEP IMPURITIES IN SEMICONDUCTORS [J].
CALDAS, MJ ;
FAZZIO, A ;
ZUNGER, A .
APPLIED PHYSICS LETTERS, 1984, 45 (06) :671-673
[2]   High-transconductance self-aligned AlGaN/GaN modulation-doped field-effect transistors with regrown ohmic contacts [J].
Chen, CH ;
Keller, S ;
Parish, G ;
Vetury, R ;
Kozodoy, P ;
Hu, EL ;
Denbaars, SP ;
Mishra, UK ;
Wu, YF .
APPLIED PHYSICS LETTERS, 1998, 73 (21) :3147-3149
[3]   Characterizations of deep levels in SnTe-doped GaSb by admittance spectroscopy [J].
Chen, JF ;
Chen, NC ;
Liu, HS .
APPLIED PHYSICS LETTERS, 1996, 69 (13) :1891-1893
[4]   Fabrication and characterisation of enhanced barrier AlGaN/GaN HFET [J].
Dang, XZ ;
Welty, RJ ;
Qiao, D ;
Asbeck, PM ;
Lau, SS ;
Yu, ET ;
Boutros, KS ;
Redwing, JM .
ELECTRONICS LETTERS, 1999, 35 (07) :602-603
[5]   AlGaN/GaN double heterostructure channel modulation doped field effect transistors (MODFETs) [J].
Fan, ZF ;
Lu, CZ ;
Botchkarev, AE ;
Tang, H ;
Salvador, A ;
Aktas, O ;
Kim, W ;
Morkoc, H .
ELECTRONICS LETTERS, 1997, 33 (09) :814-815
[6]  
GEORGESCU B, 1996, P 8 INT C IND PHOSPH, P658
[7]   Large signal frequency dispersion of AlGaN GaN heterostructure field effect transistors [J].
Kohn, E ;
Daumiller, I ;
Schmid, P ;
Nguyen, NX ;
Nguyen, CN .
ELECTRONICS LETTERS, 1999, 35 (12) :1022-1024
[8]  
KRISPIN P, 1996, APPL PHYS LETT, V70, P1432
[9]   LOW-FREQUENCY DISPERSION CHARACTERISTICS OF GAN HFETS [J].
KRUPPA, W ;
BINARI, SC ;
DOVERSPIKE, K .
ELECTRONICS LETTERS, 1995, 31 (22) :1951-1952
[10]   HIGH DISLOCATION DENSITIES IN HIGH-EFFICIENCY GAN-BASED LIGHT-EMITTING-DIODES [J].
LESTER, SD ;
PONCE, FA ;
CRAFORD, MG ;
STEIGERWALD, DA .
APPLIED PHYSICS LETTERS, 1995, 66 (10) :1249-1251