Highly oriented rutile-type TiO2 films synthesized by ion beam enhanced deposition

被引：37

作者：

Zhang, F

Zheng, ZH

Ding, XZ

Mao, YJ

Chen, Y

Zhou, ZY

Yang, SQ

Liu, XH

机构：

[1] Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1997年 / 15卷 / 04期

关键词：

D O I：

10.1116/1.580798

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ion beam enhanced deposition was adopted to synthesize titanium dioxide (TiO2) films. The films were prepared by Ti evaporation and Xe+ ion beam bombardment in an O-2 environment. The xenon ion energy varied from 40 to 80 keV. The compositions of the TiO2 films were studied by Rutherford backscattering analysis. All the films were close to stoichiometric. The structure of the films were researched by x-ray diffraction. The results showed that the titanium oxide films exhibit a rutile phase structure with high (200) orientation. The optical properties were also studied using ultraviolet-visible transmission spectrometry. (C) 1997 American Vacuum Society.

引用

页码：1824 / 1827

页数：4

共 17 条

[1] A NEW TIO2 FILM DEPOSITION PROCESS IN A SUPERCRITICAL-FLUID
BOCQUET, JF
CHHOR, K
POMMIER, C
[J]. SURFACE & COATINGS TECHNOLOGY, 1994, 70 (01) : 73 - 78
[2] C-V CHARACTERISTICS OF METAL-TITANIUM DIOXIDE-SILICON CAPACITORS
BROWN, WD
GRANNEMANN, WW
[J]. SOLID-STATE ELECTRONICS, 1978, 21 (06) : 837 - 846
[3] BUTTER MA, 1980, J MATER SCI, V15, P19
[4] EBERT R, 1982, P WORLD C MED PHYS B
[5] GUSMANO G, 1993, NIPPON SERAM KYO GAK, V101, P1095, DOI 10.2109/jcersj.101.1095
[6] Huang N, 1994, J Biomater Appl, V8, P404, DOI 10.1177/088532829400800406
[7] TIO2 THICK-FILM GAS SENSORS AND THEIR SUITABILITY FOR NO(X) MONITORING
HUUSKO, J
LANTTO, V
TORVELA, H
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1993, 16 (1-3) : 245 - 248
[8] CHARACTERIZATION OF TIO2 AND ZRO2 COATINGS ON SILICA SLABS AND FIBERS
JUREK, K
GUGLIELMI, M
KUNCOVA, G
RENNER, O
LUKES, F
NAVRATIL, M
KROUSKY, E
VORLICEK, V
KOKESOVA, K
[J]. JOURNAL OF MATERIALS SCIENCE, 1992, 27 (09) : 2549 - 2555
[9] SOLUTION PRECURSOR CHEMICAL VAPOR-DEPOSITION OF TITANIUM-OXIDE THIN-FILMS
LU, JP
WANG, JD
RAJ, R
[J]. THIN SOLID FILMS, 1991, 204 (01) : L13 - L17
[10] MICROSTRUCTURE OF TITANIUM-OXIDE FILMS SYNTHESIZED BY ION-BEAM DYNAMIC MIXING
MAKINO, Y
SETSUHARA, Y
MIYAKE, S
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 91 (1-4) : 696 - 700

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