MICROSTRUCTURE OF TITANIUM-OXIDE FILMS SYNTHESIZED BY ION-BEAM DYNAMIC MIXING

The microstructure of titanium oxide films synthesized by the ion beam dynamic mixing (IBDM) method is investigated by glancing angle X-ray diffraction and multi-reflectance FT-IR methods. Titanium oxide films are identified as rutile phases having different degrees Of (I 10) orientation. The IBDM rutile phase with a standard crystalline state is produced by controlling the ratio of the intensities between the (110) and (101) peaks of the rutile, I(110)/I(101), so as to approach the ratio to the value ( = 2.0) of ASTM standard rutile. The crystallite size of the rutile phase increases with increasing ratio of intensities of the two XRD peaks, I(110)/I(101). The increase of the crystallite size is suggested to be attributed to the increase of oxygen ion energy per Ti atom. From the dependence of the IR absorption near 500 cm-1 upon 1(110)/I(101), it is indicated that the Ti-O bond strength is delicately affected by the degree of (110) orientation of the IBDM rutile phase.