PROPERTIES OF ALUMINUM NITRIDE FILMS BY AN ION-BEAM AND VAPOR-DEPOSITION METHOD

被引：37

作者：

OGATA, K

ANDOH, Y

KAMIJO, E

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90766-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

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页码：178 / 181

页数：4

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