MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION

被引：213

作者：

MARTIN, PJ

NETTERFIELD, RP

SAINTY, WG

机构：

来源：

关键词：

D O I：

10.1063/1.332871

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：235 / 241

页数：7

共 20 条

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