Laboratory arrangement for soft x-ray zone plate efficiency measurements

被引：15

作者：

Bertilson, Michael C. ^{[1
]}

Takman, Per A. C. ^{[1
]}

Holmberg, Anders ^{[1
]}

Vogt, Ulrich ^{[1
]}

Hertz, Hans M. ^{[1
]}

机构：

[1] Royal Inst Technol, Dept Appl Phys, SE-10691 Stockholm, Sweden

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2007年 / 78卷 / 02期

关键词：

D O I：

10.1063/1.2472590

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We demonstrate a laboratory-scale arrangement for rapid and accurate measurements of the absolute and local efficiency of soft x-ray micro zone plates in the water window. This in-house instrument is based on a single-line lambda=2.88 nm liquid-jet laser-plasma source. Measurements are performed by a simultaneous comparison of first diffraction-order photon flux with the flux in a calibrated reference signal. This arrangement eliminates existing source emission fluctuations. The performance of the method is demonstrated by the result from measurements of two similar to 55 mu m diameter nickel micro zone plates, showing a groove efficiency of 12.9%+/- 1.1% and 11.7%+/- 1.0%. Furthermore, we show that spatially resolved efficiency mapping is an effective tool for a detailed characterization of local zone plate properties. Thus, this laboratory-scale instrument allows rapid feedback to the fabrication process which is important for future improvements. (c) 2007 American Institute of Physics.

引用

页数：3