High frequency SAW devices based on third harmonic generation

被引：23

作者：

Le Brizoual, L. ^{[1
]}

Elmazria, O. ^{[1
]}

Sarry, F. ^{[1
]}

El Hakiki, M. ^{[1
]}

Talbi, A. ^{[1
]}

Alnot, P. ^{[1
]}

机构：

[1] Univ Nancy 1, CNRS 7040, Fac Sci & Tech, Lab Phys Milieux Ionises & Applicat, F-54506 Vandoeuvre Les Nancy, France

来源：

ULTRASONICS | 2006年 / 45卷 / 1-4期

关键词：

surface acoustic waves; third harmonic; zinc oxide;

D O I：

10.1016/j.ultras.2006.07.013

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We demonstrate the third harmonic generation in a ZnO/Si layered structure to obtain high frequency SAW devices. This configuration eliminates the need of high lithography resolution and allows easy integration of such devices and electronics on the same wafer. A theoretical study was carried out for the determination of the phase velocity and the electromechanical coupling coefficient (K-2) dispersion curves of the surface acoustic waves. These results are also in agreement with those measured on a SAW filter designed for the third harmonic generation and the operating frequency is up to 2468 MHz. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：100 / 103

页数：4

共 10 条

[1]

Campbell CK, 1998, ULTRASON, P169, DOI 10.1109/ULTSYM.1998.762124

[2] A METHOD FOR ESTIMATING OPTIMAL CRYSTAL CUTS AND PROPAGATION DIRECTIONS FOR EXCITATION OF PIEZOELECTRIC SURFACE WAVES [J].