Preparation and characterization of indium-doped tin oxide thin films

被引:104
作者
Manoj, P. K.
Joseph, Benny
Vaidyan, V. K.
Amma, D. Sumangala Devi [1 ]
机构
[1] TKM Coll Arts & Sci, Dept Phys, Kollam 691005, India
[2] Univ Kerala, Dept Phys, Thiruvananthapuram 695581, Kerala, India
[3] St Josephs Coll, Dept Phys, Calicut 673008, Kerala, India
关键词
indium-doped tin oxide; thin films; spray pyrolysis;
D O I
10.1016/j.ceramint.2005.09.016
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Hishly transparent and semiconducting indium-doped tin oxide films were prepared by spray pyrolysis. These films were characterized by Xray diffraction. scanning electron microscopy, energy dispersive spectroscopy and optical transmission. X-ray diffraction studies have shown the polycrystalline nature of the films. The preferential orientations as well as the electro-optical properties are sensitive to indium doping. The structural, electrical and optical studies carried out on these films reveal their columnar and compact structure. (c) 2005 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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页码:273 / 278
页数:6
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