Preparation and properties of (Pb, Ca)TiO3 thin films by multiple-cathode sputtering

被引：21

作者：

Maiwa, H ^{[1
]}

Ichinose, N ^{[1
]}

机构：

[1] WASEDA UNIV,SCH SCI & ENGN,DEPT MAT SCI & ENGN,TOKYO 169,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 9B期

关键词：

ferroelectric thin films; (Pb; Ca)TiO3; multiple-cathode sputtering; low substrate temperature; remanent polarization; leakage current;

D O I：

10.1143/JJAP.36.5825

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

(Pb, Ca)TiO3 (PCT) thin films were fabricated by multiple-cathode RF-magnetron sputtering, using PbO, CaTiO3 and Ti metal targets. PCT films deposited on Pt/Ti/SiO2/Si and Pt/MgO at the substrate temperature from 460 degrees C to 540 degrees C had perovskite structures. The relationship between the substrate temperature and the film properties were investigated. The remanent polarization, dielectric constant and leakage current of the 200-nm-thick PCT(Ca/Ti=0.30) thin films deposited on Pt/Ti/SiO2/Si at 460 degrees C and on Pt/NgO at 500 degrees C were 22.5 mu C/cm(2) 225 and on the order of 10(-7) A/cm(2) (at a field of 250 kV/cm), 41 mu C/cm(2), 174 and on the order of 10(-7) A/cm(2) (at a field of 250 kV/cm), respectively.

引用

页码：5825 / 5828

页数：4

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